Date of Award

Spring 2008

Abstract

An integrated high voltage bias driver for a Radio Frequency Micro-Electro-Mechanical System (RF MEMS) microswitch is proposed. The design and implementation in a 0.7mum integrated circuit process with high and low voltage transistors is shown along with tested results. High voltage Double-Diffused Metal Oxide Semiconductor (DMOS) transistors in combination with low voltage digital logic provide a non-linear solution that achieves rise and fall times of 1mus while keeping power use to a minimum. System design and tradeoffs are presented for alternate approaches and combinations as well as future integration with Direct Current--Direct Current (DC-DC) voltage conversion and an internally generated clock.

First Advisor

John R LaCourse

Department or Program

Electrical Engineering

Degree Name

Master of Science

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