"High voltage bias waveform generator for an RF MEMS microswitch" by James A. Brandt

Date of Award

Spring 2008

Project Type

Thesis

Program or Major

Electrical Engineering

Degree Name

Master of Science

First Advisor

John R LaCourse

Abstract

An integrated high voltage bias driver for a Radio Frequency Micro-Electro-Mechanical System (RF MEMS) microswitch is proposed. The design and implementation in a 0.7mum integrated circuit process with high and low voltage transistors is shown along with tested results. High voltage Double-Diffused Metal Oxide Semiconductor (DMOS) transistors in combination with low voltage digital logic provide a non-linear solution that achieves rise and fall times of 1mus while keeping power use to a minimum. System design and tradeoffs are presented for alternate approaches and combinations as well as future integration with Direct Current--Direct Current (DC-DC) voltage conversion and an internally generated clock.

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